Ibikorwa vyihariye vy'ibikoresho vy'isuku vya Plasma

Amamashini yo gusukura/gucapura plasma atanga plasma mu gushiramwo ama electrode abiri mu kintu gipfutse kugira ngo haboneke umuyagankuba. Ipompa y’ubusa ikoreshwa kugira ngo umuntu agumane urugero runaka rw’ubusa. Uko iyo gazi igenda iragabanuka, ni ko n’urugendo ruri hagati y’ibihimba vy’umubiri n’ugutembera kw’ibihimba canke iyoni na rwo nyene rugenda ruragwira. Iyo izo ions zikozweko n’umuyagankuba, zirahura zigaca zigira plasma. Izo ions zirashobora gukora cane, zifise inguvu zihagije zo guca hafi imigenderanire yose y’imiti, zigatuma habaho imigenderanire y’imiti ku kintu cose kigaragara. Ivyo bihimba bitandukanye vy’umuyagankuba birafise imiterere itandukanye y’imiti. Nk’akarorero, plasma y’umwuka w’ikirere iratera cane umwuka w’ikirere, irashobora gutera umwuka w’ikirere (photoresist) kugira ngo ivemwo gaze, gutyo igatuma umuntu ashobora gusukura. Plasma y’umuyagankuba ishobora gutera uburozi irafise anisotropie nziza cane, ikaba ihuye n’ibisabwa vyo gucapura. Ugukoresha plasma bituma umuntu agira umuco, ni co gituma yitwa glow discharge.
Uburyo bwo gusukura plasma bushingiye ahanini ku "gukora" kw'ibihimba bikora muri plasma kugira ngo bikureho amabara yo ku ruhande. Ku bijanye n’uburyo bwo gusubiza, gusukura plasma muri rusangi birimwo uburyo bukurikira: imyuka idafise ubuzima iravyurirwa umutima ikaja mu buryo bwa plasma; ibintu bimeze nk’umuyaga biranywanywa ku kintu gikomeye; imigwi ifatanye irakorana n’ibihimba biri ku ruhande rukomeye kugira ngo ikore ibihimba vy’umubiri; izo molecule z’ibintu zibora zigacika igice c’umuyagankuba; kandi ibisigarira vy’ivyo bisubizo birakurwa ku ruhande.

Ikintu gihambaye cane mu buhinga bwo gusukura plasma ni uko bushobora gusukura ubwoko bwose bw’ibintu, harimwo ivyuma, ivyuma bifata umuriro, ivyuma bita oxides, n’ibikoresho vyinshi vy’ivyuma nk’ivyuma bita polypropylene, polyester, polyimide, polyvinyl chloride, epoxy, eka mbere na polytetrafluoroéthylène. Ishobora gusukura ahantu hose n’ahantu kanaka, be n’ibintu bikomeye cane.